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Proceedings Paper

Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and atomic force microscopy
Author(s): Angela Duparre; Norbert Kaiser; Horst Truckenbrodt; Manfred R. Berger; Arno Kohler
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Paper Abstract

The roughness of a number of uncoated glass substrates with different surface quality as well as surfaces of fluoride films is investigated by various characterization techniques. The influence of bandwidth limitation and the dependence on the examined sample area become obvious. The results obtained from the different measuring methods are shown to complement each other appropriately.

Paper Details

Date Published: 1 December 1993
PDF: 12 pages
Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); doi: 10.1117/12.162647
Show Author Affiliations
Angela Duparre, Fraunhofer-Institution for Applied Optics and Fine Mechanics (Germany)
Norbert Kaiser, Fraunhofer-Institution for Applied Optics and Fine Mechanics (Germany)
Horst Truckenbrodt, Friedrich-Schiller-Univ. Jena (Germany)
Manfred R. Berger, L.O.T. - ORIEL GmbH (Germany)
Arno Kohler, L.O.T. - ORIEL GmbH (Germany)


Published in SPIE Proceedings Vol. 1995:
Optical Scattering: Applications, Measurement, and Theory II
John C. Stover, Editor(s)

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