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Proceedings Paper

Design review of a high-accuracy UV to near-IR scatterometer
Author(s): Tod F. Schiff; Mary W. Knighton; Daniel J. Wilson; Fredrick M. Cady; John C. Stover; James J. Butler
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Paper Abstract

A unique broadband scatterometer has been designed, built and tested for NASA Goddard. One use of the instrument will be to accurately measure the BRDF of calibration standards used by shuttle astronauts in experiments to measure atmospheric ozone. BRDF accuracy is better than 1% except for angles of incidence and scatter greater than 80 degrees. The source employs a high intensity xenon arc and programmable monochromator that allows measurements to be made anywhere from 0.23 to 0.9 micrometers over adjustable bandwidths as small as four nanometers. The goniometer allows out-of-plane measurements to be made in either transmission or reflection from horizontal samples.

Paper Details

Date Published: 1 December 1993
PDF: 10 pages
Proc. SPIE 1995, Optical Scattering: Applications, Measurement, and Theory II, (1 December 1993); doi: 10.1117/12.162643
Show Author Affiliations
Tod F. Schiff, TMA Technologies, Inc. (United States)
Mary W. Knighton, TMA Technologies, Inc. (United States)
Daniel J. Wilson, TMA Technologies, Inc. (United States)
Fredrick M. Cady, TMA Technologies, Inc. (United States)
John C. Stover, TMA Technologies, Inc. (United States)
James J. Butler, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 1995:
Optical Scattering: Applications, Measurement, and Theory II
John C. Stover, Editor(s)

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