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Proceedings Paper

Laser heterodyne profilometer with several improved techniques
Author(s): Xiang Li; Jia Wang; Yang Zhao; Mang Cao; Dacheng Li
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Paper Abstract

An optical heterodyne system for the measurement of profile and roughness has been developed. Several improved techniques are employed. The optical system was designed with entire common path. The effect of sample vibration and the thermal drift could be eliminated. A modified objective was used to perform respectively the measurement beam and the reference beam. The detected signals were processed with phase comparison technique to give a high accuracy. The optical system can be developed to an accessory of the Zeeman laser interferometers.

Paper Details

Date Published: 22 October 1993
PDF: 5 pages
Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); doi: 10.1117/12.162104
Show Author Affiliations
Xiang Li, Tsinghua Univ. (China)
Jia Wang, Tsinghua Univ. (China)
Yang Zhao, Tsinghua Univ. (China)
Mang Cao, Tsinghua Univ. (China)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2066:
Industrial Optical Sensing and Metrology: Applications and Integration
Kevin G. Harding; H. Philip Stahl, Editor(s)

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