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Proceedings Paper

Multibeam holographic optical sensor for control of diamond turning
Author(s): Bao Hua Zhuang; Ji-Hua Zhang; Keqian Lu; Rongjiu Han
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Paper Abstract

The purpose of this paper is to describe a new precision displacement sensor--Multi-Beam Holographic Optical Sensor (MBHOS) for control of diamond turning--with the use of holographic optical element (HOE) technology. MBHOS is actually an integrated sensor which serves as three sensors. It can be used with the function of a single sensor to be a feedback component in closed loop control system and it can be used in the differential mode to detect the angular components of the micro-tool servo motion and to eliminate or to minimize the vibration errors with the function of three sensors. The ir HOEs are made by using a computer generated hologram (CGH) method. A computer simulation method is used to analyze the performances of this integrated sensor system. The initial experimental results of the MBHOS are obtained. The MBHOS is both compact and inexpensive.

Paper Details

Date Published: 22 October 1993
PDF: 6 pages
Proc. SPIE 2066, Industrial Optical Sensing and Metrology: Applications and Integration, (22 October 1993); doi: 10.1117/12.162101
Show Author Affiliations
Bao Hua Zhuang, Tianjin Univ. (China)
Ji-Hua Zhang, Tianjin Univ. (China)
Keqian Lu, Tianjin Univ. (China)
Rongjiu Han, State Key Lab. of Applied Optics (China)


Published in SPIE Proceedings Vol. 2066:
Industrial Optical Sensing and Metrology: Applications and Integration
Kevin G. Harding; H. Philip Stahl, Editor(s)

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