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Proceedings Paper

Optimization of the electrical and optical properties of ITO layers deposited by magnetron sputtering
Author(s): Geoff Cochrane; Zhitao Zheng; Geoffrey B. Smith
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Paper Abstract

A comprehensive investigation of the deposition parameters of In2O3:Sn films on Corning 7059 glass substrates using r.f. planar magnetron sputtering has lead to the production of films with sheet resistance < 1.5 ohms per square, an integrated luminous transmittance of approximately 77% and an integrated solar transmittance of approximately 54%. Films characterized by measurement of their resistivity and Hall coefficient show a distinct minimum in film resistivity with deposition rate, substrate temperature, oxygen partial pressure, total deposition pressure and target composition. Results are presented showing the variation in carrier concentration and carrier mobility as a function of the deposition parameters together with the optical properties and microstructure of films with a resistivity approaching 10-4 (Omega) cm. Potentially, films with these properties can be used for energy efficient window applications. The results indicate that it should be possible to industrially produce large area ITO for electrochromic windows with sufficiently low sheet resistance coupled with high visible transmittance.

Paper Details

Date Published: 22 October 1993
PDF: 7 pages
Proc. SPIE 2017, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XII, (22 October 1993); doi: 10.1117/12.161983
Show Author Affiliations
Geoff Cochrane, Australian Defence Force Academy (Australia)
Zhitao Zheng, Australian Defence Force Academy (Australia)
Geoffrey B. Smith, Univ. of Technology Sydney (Australia)

Published in SPIE Proceedings Vol. 2017:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XII
Carl M. Lampert, Editor(s)

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