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Proceedings Paper

Silicon-microstructure superconducting microbolometer infrared arrays
Author(s): Burgess R. Johnson; Paul W. Kruse
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Paper Abstract

High-temperature superconducting microbolometer silicon microstructure infrared arrays offer the potential of lowest possible production cost combined with high performance for use in infrared imaging systems. Linear arrays employing thin films of yttrium barium copper oxide have been prepared. Small two-dimensional arrays are under development. A 240 X 336 array of 50 micrometers X 50 micrometers pixels operating at 85 K at 30 frames per second with f/1 optics has a theoretical noise equivalent temperature difference of 2.0 X 10-3 deg K.

Paper Details

Date Published: 1 November 1993
PDF: 10 pages
Proc. SPIE 2020, Infrared Technology XIX, (1 November 1993); doi: 10.1117/12.160529
Show Author Affiliations
Burgess R. Johnson, Honeywell Sensor and System Development Ctr. (United States)
Paul W. Kruse, Honeywell Sensor and System Development Ctr. (United States)

Published in SPIE Proceedings Vol. 2020:
Infrared Technology XIX
Bjorn F. Andresen; Freeman D. Shepherd, Editor(s)

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