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Proceedings Paper

Active optical systems for projection interferometry
Author(s): A. M. Bakiev; Pulat K. Khabibullayev; S. Kh. Valiev
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Paper Abstract

Different types of interferometers designed by authors and based on the active optical system with a copper-vapor brightness amplifier are considered. These devices are shown to make it possible to control the quality of multilayer films on semiconductor surfaces, to measure small elements of the relief with extremely high accuracy. Rather large objects can be measured as well (the field of view can have a diameter as large as 35 mm).

Paper Details

Date Published: 7 October 1993
PDF: 9 pages
Proc. SPIE 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications, (7 October 1993); doi: 10.1117/12.160516
Show Author Affiliations
A. M. Bakiev, SV OPTIKON (Uzbekistan)
Pulat K. Khabibullayev, SV OPTIKON (Uzbekistan)
S. Kh. Valiev, SV OPTIKON (Uzbekistan)


Published in SPIE Proceedings Vol. 2110:
CIS Selected Papers: Metal Vapor Lasers and Their Applications

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