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Proceedings Paper

Alignment sensor with integrated analog signal processing
Author(s): Christopher B. Umminger; Charles G. Sodini
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Paper Abstract

Automatic alignment is a computationally intensive task that slows some manufacturing processes which require it. In order to improve alignment speed we have designed a sensor that combines the imaging operation with the computation of the alignment error. The sensor is specially designed to work with the surveyor's mark in a two step operation. Coarse alignment is performed by operating as a four quadrant sensor and fine positioning is achieved using edge detection. Photodiodes are used for imaging and integrated amplifiers convert the photocurrents into an alignment error signal which is independent of illumination level. A version of this sensor has been fabricated and preliminary tests show that it functions as expected.

Paper Details

Date Published: 15 October 1993
PDF: 8 pages
Proc. SPIE 1996, Optical Alignment, (15 October 1993); doi: 10.1117/12.160402
Show Author Affiliations
Christopher B. Umminger, Massachusetts Institute of Technology (United States)
Charles G. Sodini, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1996:
Optical Alignment
Mitchell C. Ruda, Editor(s)

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