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Proceedings Paper

X-ray investigations of the heterogeneous terraced structure in GaAs(P)/GaAs superlattice
Author(s): Jaroslaw Gaca
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Paper Abstract

The x-ray diffraction investigations of the terraced structure in GaAs(P)/GaAs superlattice were performed, assuming that there appears scattering of the terrace widths. It was shown that in this case the satellite profiles are significantly affected by interference.

Paper Details

Date Published: 15 October 1993
PDF: 4 pages
Proc. SPIE 1845, Liquid and Solid State Crystals: Physics, Technology and Applications, (15 October 1993); doi: 10.1117/12.156925
Show Author Affiliations
Jaroslaw Gaca, Institute of Electronic Materials Technology (Poland)


Published in SPIE Proceedings Vol. 1845:
Liquid and Solid State Crystals: Physics, Technology and Applications

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