Share Email Print
cover

Proceedings Paper

High-precision laser interferometer for length metrology
Author(s): Jiajing Pi; Li-Zhuan Zhao; Jian-Guo Du; Wei-Guo Shen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The instrument of type JLY-100 is a standing laser interferometer the wavelength of He-20Ne frequency stabilized laser is used as the standard of length metrology. The temperatures of environment and measurand are measured by a crystal thermometer. The measuring results affected by the environmental parameters can be automatically corrected by a microprocessor. The measuring range of instrument is 0-100 mm. The absolute measuring error is +O. 5L)tm where L is the length of the measurand in meter and the relative accuracy is y 1 x 106.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156509
Show Author Affiliations
Jiajing Pi, Wuhan Bureau of Standards and Metrology (China)
Li-Zhuan Zhao, Henan Provincial Institute for Measurement (China)
Jian-Guo Du, Henan Provincial Institute for Measurement (China)
Wei-Guo Shen, Henan Provincial Institute for Measurement (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

© SPIE. Terms of Use
Back to Top