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Proceedings Paper

High- precision measuring system of surface roughness
Author(s): Xiao-Feng Na; Zhaobang Pu; Xiu-Mei Wen
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Paper Abstract

This paper introduces the high precision measuring system of surface roughness that makes use of CCD (charge-coupled device) to collect signal of surface interference stripe and single piece computer to control sampling and treat measured data. The main features of the system are as follows :the CCD picture sensor and its driving device are put on the Camera window of the interference microscope which remains unchanged. The single piece computer intel 8031 is used to control step motor to drive CCD driving device and three state gate on-off to select sampling or treating in high speed. This measuring system is not only in high measuring speed but also with high measuring precision. It can measure several commonly used roughness parameter such as Ra rather than measure one parameter as R by traditional system. It can makes the traditional interference microsoope get rid of the primitive measuring method such as visual aim manual operation and manual data treatment As the result the intelligent measurement of non-contact measuring roughness is realized. Key Word :CCD single piece compater Surface interference stripe interference microscope

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156507
Show Author Affiliations
Xiao-Feng Na, Harbin Institute of Technology (China)
Zhaobang Pu, Harbin Institute of Technology (China)
Xiu-Mei Wen, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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