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Proceedings Paper

Grating quadrature fringe subdivision with submicron accuracy and its application in CMM
Author(s): Rensheng Che; Li-Yan Chen; Cheng-Jun Chen; Qingcheng Huang
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Paper Abstract

The significant resolution and accuracy of CMM ( Coordinat Measuring Machine ) using grating quadrature fringe detection are often limited not only by the CMM itself but also by the grating displasment measuring system. There are four errors: amplitude waver unequal amplitude in the two channels quadrature phase shift error and zero offsets. This paper describes a new method for picking up correcting the quadrature errors and subdividing -- method of composite compensating subdivision using microcomputer. An example demonstrated the significant improving of the precision of CMM and the reducing the needs of fix and adjustment of grading pair is given.

Paper Details

Date Published: 22 September 1993
PDF: 3 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156503
Show Author Affiliations
Rensheng Che, Harbin Institute of Technology (China)
Li-Yan Chen, Harbin Institute of Technology (China)
Cheng-Jun Chen, Harbin Institute of Technology (China)
Qingcheng Huang, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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