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Proceedings Paper

Grating interference technology and its application
Author(s): Tie-Bang Xie; Bin Liu Zhao; Dong-Lian Zheng
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Paper Abstract

Grating interference technology because of its many advantages has been developed greatly in the field of fine metrology. The principle and characteristics of grating interference are analyzed and examples of its successful application are given.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156500
Show Author Affiliations
Tie-Bang Xie, Huazhong Univ. of Science and Technology (China)
Bin Liu Zhao, Huazhong Univ. of Science and Technology (China)
Dong-Lian Zheng, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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