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Proceedings Paper

Focus-tracing method applied in optical probes
Author(s): Ji-Hua Zhang; Bao Hua Zhuang; Shenghua Ye
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Paper Abstract

Off-focus detection methods have been successfully applied in measuring micro-displacement and surface roughness. but there are imperfects in these methods. For example range of measurement is too small and accuracy of measurement is seriously affected by the inclination of measured surface To overcome these problems focus-tracing methods have been developed. In this paper a moving voice coil is used as focus actuator to drive the object lens up and down. The basic composition and characteristics of the actuator are described The features of displacement and frequency response of the probe are analysed. Some experiment results are given.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156493
Show Author Affiliations
Ji-Hua Zhang, Tianjin Univ. (China)
Bao Hua Zhuang, Tianjin Univ. (China)
Shenghua Ye, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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