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Proceedings Paper

Novel cantilever-beam field-emission pressure sensor
Author(s): Ruey-Shing Star Huang; Hsien-Chung Lee; Mark Gross; C. M. Horwitz
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Paper Details

Date Published: 22 September 1993
PDF: 12 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156490
Show Author Affiliations
Ruey-Shing Star Huang, Univ. of New South Wales (Australia)
Hsien-Chung Lee, Univ. of New South Wales (Australia)
Mark Gross, Univ. of New South Wales (Australia)
C. M. Horwitz, Univ. of New South Wales (Australia)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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