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Proceedings Paper

Novel cantilever-beam field-emission pressure sensor
Author(s): Ruey-Shing Star Huang; Hsien-Chung Lee; Mark Gross; C. M. Horwitz
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Paper Abstract

Due to an increasing interest in the study of field emission emitters for vacuum microelectronic devices a variety of new designs on cold cathodes were reported. In this paper we will report a novel pressure sensor utilizing the field-emission from two cantilever beams on a thin pressure sensitive silicon diaphragm. A simulation of the normalized output current as a funcfion of applied pressure is presented. Results of experimental cantilever-beam field-emission pressure sensor and some of the emission phenomena are reported.

Paper Details

Date Published: 22 September 1993
PDF: 12 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156490
Show Author Affiliations
Ruey-Shing Star Huang, Univ. of New South Wales (Australia)
Hsien-Chung Lee, Univ. of New South Wales (Australia)
Mark Gross, Univ. of New South Wales (Australia)
C. M. Horwitz, Univ. of New South Wales (Australia)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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