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Proceedings Paper

Parallel beam-scanning system for flatness measurements of thin plates
Author(s): Kuang-Chao Fan; John H. Wu
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Paper Details

Date Published: 22 September 1993
PDF: 12 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156468
Show Author Affiliations
Kuang-Chao Fan, National Taiwan Univ. (Taiwan)
John H. Wu, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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