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Proceedings Paper

Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range
Author(s): Xiao Dong Lu; Xiangqian Jiang; Tie-Bang Xie; Zhu Li
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Paper Abstract

In this paper a new stylus sensor is introduced which has high accuracy microdisplacement and wide dynamic range. Its resolution is O. OO5m its range of vertical measurement is mm. The sensor''s mechanical characteristics including statical and dynamic mechanical characteristics are discussed. Key words: surface roughness roughness measurement sensor design

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156461
Show Author Affiliations
Xiao Dong Lu, Huazhong Univ. of Science and Technology (China)
Xiangqian Jiang, Huazhong Univ. of Science and Technology (China)
Tie-Bang Xie, Huazhong Univ. of Science and Technology (China)
Zhu Li, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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