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Proceedings Paper

Two-dimensional-SROP-1: optical profiler for surface-roughness measurement
Author(s): Chong Liu; Zhu Li; Jiabi Chen
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Paper Abstract

A new optical profiler for surface roughness measurement developed by the authors is described in this paper. Based on an analyses of phase shifting error in phase shifting interferiietry a new algorithm for eliminating the effect of the error is presented. The experiments show that the development of this instrument is successful and it has a vertical resolution of 1 nni lateral resolution of 0. 42 Itm and a repeatability of Ra 0. 6 nni.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156458
Show Author Affiliations
Chong Liu, Huazhong Univ. of Science and Technology (China)
Zhu Li, Huazhong Univ. of Science and Technology (China)
Jiabi Chen, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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