Share Email Print

Proceedings Paper

Capacitive inclination sensor made of quartz
Author(s): Feng Yuan; Qi-Shan Wang; Cheng-Bin Wang; Maosheng Cao
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Fused quartz is characterized by extreme low coefficient of linear expansion , small elastic hysteresis and good stability. Thus , it is an ideal material for sensor. A capacitive inclination sensor i s presented in this paper ,whose sensing element is made of fused quartz and fixed plates are made of invar. So it has very small temperature shift. The sensor uses differential structure to reduce non-linearity and improve sensitivity. Its mass block is supported by a flexibility bridge. Therefore , friction, wearing and moving due to the gap in supports are avoided. The design work and experiment results are given in the paper.

Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156439
Show Author Affiliations
Feng Yuan, Harbin Institute of Technology (China)
Qi-Shan Wang, Harbin Institute of Science and Technology (China)
Cheng-Bin Wang, Harbin Institute of Electrical Technology (China)
Maosheng Cao, Qiqihar Institute of Light Industry (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

© SPIE. Terms of Use
Back to Top