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Proceedings Paper

Theoretical analysis and testing research of vibration isolation system for the scanning tunneling microscope
Author(s): Hong-Hai Zhang; Shang-Ping Li; Gui-Jing Sun; Hanming Shi; Ri-Yao Chen
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Paper Abstract

The main problem encountered in the design of a scanning tunneling microscope is to maintain a precise tipsample position , which is affected mainly by vibration. This paper describes the design for a vibration isolation system consisting of spring suspension and a stack of several metallic plates ,separated by rubber elements respectively. The theoretical analysis and testing research of that is included. In our instruments ,the effect on the vibration isolation of different values of parameters such as the number of stacks (N) and the mass(M)is analysed, the good results of antivibration are obtained.

Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156415
Show Author Affiliations
Hong-Hai Zhang, Huazhong Univ. of Science and Technology (China)
Shang-Ping Li, Huazhong Univ. of Science and Technology (China)
Gui-Jing Sun, Huazhong Univ. of Science and Technology (China)
Hanming Shi, Huazhong Univ. of Science and Technology (China)
Ri-Yao Chen, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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