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Proceedings Paper

Super-precise measurement system controlled by computer in a servo-writer
Author(s): Lian Xing Jia; Shengsheng Yu; Zhimin Yuan
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Paper Abstract

The paper gives a realization of the positioning system in a servo-writer, and discusses the Super Precise Measurement System controlled by a computer in detail. It gives a parallel 16-bit interface circuit with higher data transmission ratio, and analyses the facters which affect the measurement accuracy. The measurement accuracy of the system for the position is O.O2μm.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156408
Show Author Affiliations
Lian Xing Jia, Huazhong Univ. of Science and Technology (China)
Shengsheng Yu, Huazhong Univ. of Science and Technology (China)
Zhimin Yuan, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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