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Proceedings Paper

Study of a new measuring method by metering grating
Author(s): Hong-Lin Yu
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Paper Abstract

A new measuring method by metering grating is introduced in this paper that is, a special solid -atate image sensor (self-scanned photodiode array) is used to replace the motionless grating in the new measuring system which also consists of a movable grating and high resolution can be achieved by acquiring grating information directly. The measuring accuracy is not influenced by the quality of Moire signal, and the measuring system can reach a high resolution of more than 1000 and has the advantage of high resistance to interference.

Paper Details

Date Published: 22 September 1993
PDF: 3 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156397
Show Author Affiliations
Hong-Lin Yu, Chongqing Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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