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Proceedings Paper

Study of several problems of a scanning-tunneling microscope used for microtopography measurement
Author(s): Shang-Ping Li; Hong-Hai Zhang; Gui-Jin Shuen; Liang-Fu Xie; Ri-Yao Chen; Hanming Shi
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Paper Abstract

This paper deals with some critical problems about a kind of new long- range scanning tunnelling microscope (STIvI) with atomic resolution which can be used in ultra- precision and microtopography detection, Through theoretical analyses and experiment verification an ultra-feed mechanisms with nm accuracy is introduced. By both analyzing a simplified model and carrying out a sense of experiment a simple and efficient vibration isolating system used for this instrument has been studied thoroughly. Furthermore a simple and reliable tip holding method is also introduced, The experiment results indicated that this instrument can be used for measuring microtopography with nm accuracy.

Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156395
Show Author Affiliations
Shang-Ping Li, Huazhong Univ. of Science and Technology (China)
Hong-Hai Zhang, Huazhong Univ. of Science and Technology (China)
Gui-Jin Shuen, Huazhong Univ. of Science and Technology (China)
Liang-Fu Xie, Huazhong Univ. of Science and Technology (China)
Ri-Yao Chen, Huazhong Univ. of Science and Technology (China)
Hanming Shi, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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