Share Email Print
cover

Proceedings Paper

Study of several problems of a scanning-tunneling microscope used for microtopography measurement
Author(s): Shang-Ping Li; Hong-Hai Zhang; Gui-Jin Shuen; Liang-Fu Xie; Ri-Yao Chen; Hanming Shi
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper deals with some critical problems about a kind of new long- range scanning tunnelling microscope (STIvI) with atomic resolution which can be used in ultra- precision and microtopography detection, Through theoretical analyses and experiment verification an ultra-feed mechanisms with nm accuracy is introduced. By both analyzing a simplified model and carrying out a sense of experiment a simple and efficient vibration isolating system used for this instrument has been studied thoroughly. Furthermore a simple and reliable tip holding method is also introduced, The experiment results indicated that this instrument can be used for measuring microtopography with nm accuracy.

Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156395
Show Author Affiliations
Shang-Ping Li, Huazhong Univ. of Science and Technology (China)
Hong-Hai Zhang, Huazhong Univ. of Science and Technology (China)
Gui-Jin Shuen, Huazhong Univ. of Science and Technology (China)
Liang-Fu Xie, Huazhong Univ. of Science and Technology (China)
Ri-Yao Chen, Huazhong Univ. of Science and Technology (China)
Hanming Shi, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

© SPIE. Terms of Use
Back to Top