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Proceedings Paper

Study and design of microfocusing mechanism for an acoustic microscope
Author(s): Feng Zhu; Hong-Hai Zhang; Ri-Yao Chen; Qi-Kui Huang
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Paper Abstract

This paper deals with the design of a micro- focussing mechanism for the acoustic microscope through the theory of flexure hinge. The paper gives the calculating way and formulas for design of flexure hinge. The flexure hinge mechanism amplified by two step levers and corresponding controller is implemented. It is shown by experi-mental results that the resolution of the micro- focussing system is higher than 0.001mm and an adjusting range of 16Oim is achieved. In addition, the paper also discusses the driving property of a piezoelectric actuator used in flexure hinge mechanism.

Paper Details

Date Published: 22 September 1993
PDF: 6 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156393
Show Author Affiliations
Feng Zhu, Huazhong Univ. of Science and Technology (China)
Hong-Hai Zhang, Huazhong Univ. of Science and Technology (China)
Ri-Yao Chen, Huazhong Univ. of Science and Technology (China)
Qi-Kui Huang, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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