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Proceedings Paper

Research on noncontact flatness measurement of magnetic disk with optical heterodyne interferometer
Author(s): Yang Zhao; Jia Wang; Dacheng Li; Mang Cao; Xiang Li
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Paper Abstract

The paper introduces a new method to measure the flatness of the disk with the laser heterodyne interferometer. Its most important advantage is that it can measure the large and intermediate scale disk profile at the same time, without sacrificing the measurement accuracy. The resolution of the interferometer is 0.3 nm, the accuracy better than 0.04 jim, the dynamic range larger than 5 mm. Otherwise the interferometer can nieasure the disk global and local profile in tangential and radial direction.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156376
Show Author Affiliations
Yang Zhao, Tsinghua Univ. (China)
Jia Wang, Tsinghua Univ. (China)
Dacheng Li, Tsinghua Univ. (China)
Mang Cao, Tsinghua Univ. (China)
Xiang Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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