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Proceedings Paper

Precision-grating displacement transducer with an image sensor
Author(s): Xianghui Yuan; Guolin Lu; Tingchao Zhao
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Paper Abstract

A special designed image sensor named as CG2O is used to receive the grating moire signal to form a phase-modulated signal, which is processed by digital dynamic phase discrimination and subdivision. High resolution and precision can be obtained. After describing the special image sensor in brief, the paper expounds the principle of the displacement transducer,which consists of a CG2O device, a grating couple of 25 LP/mm and a single chip microprocessor 8031 and so on. The measuring resolution is 0. 1 pm. This paper is valuable in development of a new type of precision displacement transducer with high resolution.

Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156355
Show Author Affiliations
Xianghui Yuan, Chongqing Univ. (China)
Guolin Lu, Chongqing Univ. (China)
Tingchao Zhao, Chongqing Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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