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Proceedings Paper

Optical vibration measurement of mechatronics devices
Author(s): Shigeo Yanabe
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Paper Abstract

An optical vibration measuring system which enables to detect both linear and angular displacement of 25 nm and 5 prad was developed. The system is mainly composed of a He-Ne laser, a displacement detecting photo-diode and lenses, and has linear and angular displacement magnification mechanism using two different principles of optical lever. The system was applied to measure vibrational characteristics of magnetic head slider of hard disk drives and to measure stator teeth driving velocities of ultrasonic motor.

Paper Details

Date Published: 22 September 1993
PDF: 6 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156346
Show Author Affiliations
Shigeo Yanabe, Nagaoka Univ. of Technology (Japan)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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