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Proceedings Paper

Novel method for measuring the step with heterodyne interferometer
Author(s): Huijie Zhao; Pengsheng Li; Xifu Qiang; Hua Li
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Paper Abstract

A noval method for measuring the width and height. ( A/2 )of the step is introduced which uses laser heterodyne interferometer. Precise phase measurement techniques are used and the phase function during light spot passes through the step edge is gotten. Besides the step response of the interferometer is analyzed. This instrument has high resolution large scope and high positioning accuracy.

Paper Details

Date Published: 22 September 1993
PDF: 3 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156334
Show Author Affiliations
Huijie Zhao, Harbin Institute of Technology (China)
Pengsheng Li, Harbin Institute of Technology (China)
Xifu Qiang, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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