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Proceedings Paper

Novel method for measuring the step with heterodyne interferometer
Author(s): Huijie Zhao; Pengsheng Li; Xifu Qiang; Hua Li
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Paper Details

Date Published: 22 September 1993
PDF: 3 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156334
Show Author Affiliations
Huijie Zhao, Harbin Institute of Technology (China)
Pengsheng Li, Harbin Institute of Technology (China)
Xifu Qiang, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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