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Proceedings Paper

Non-contact surface roughness measurement
Author(s): Hong Gao; Shifu Xue; Qingxiang Li; Puchiang Yan
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Paper Abstract

A noncontact optical profiler for measuring surface roughness is described. The system consists of a differential interference microscope with a polarization phase shifter CCD detector array video frame grabber and computer. Interferometric phaseshifting techniques are used to obtain surface slope information. The slope data is then integrated to yield a surface profile. Vibration insensitivity has been achieved by adopting a differential interferometric scheme. The profiler has measured surface features with a vertical resolution of 1 nm and a lateral resolution of less than 0. 5 m in an ordinary laboratory environment without vibration isolation.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156333
Show Author Affiliations
Hong Gao, Tsinghua Univ. (China)
Shifu Xue, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)
Puchiang Yan, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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