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Proceedings Paper

Nanometer movement and metrology: a review of realization methods
Author(s): Hong Wei; E. J. Davis; Kenneth J. Stout
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Paper Details

Date Published: 22 September 1993
PDF: 10 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156312
Show Author Affiliations
Hong Wei, Univ. of Birmingham (United Kingdom)
E. J. Davis, Univ. of Birmingham (United Kingdom)
Kenneth J. Stout, Univ. of Birmingham (United Kingdom)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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