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Proceedings Paper

Microdisplacement generator for calibration
Author(s): Bin Li; Chong Liu; Zhu Li
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Paper Abstract

A simple and real-time micro-displacement generator is presented, which is aimed to calibrate or make comparisonwith those micro-size measuring instruments such as capacitive and inductive transducrs, heterodyne interferameters, etc. . The resolution of the generator is 2nm and the accuracy is within 5 nm.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156309
Show Author Affiliations
Bin Li, Tsinghua Univ. (China)
Chong Liu, Huazhong Univ. of Science and Technology (China)
Zhu Li, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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