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Proceedings Paper

Microdisplacement measurement in high-accuracy moving stage by strain gauges
Author(s): Pengsheng Li; Hainan Cai
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Paper Abstract

A noncontact displacement measuring apparatus similar in mechanism and electronics to the parallel bending beam weight scale has been made experimentally. The apparatus has four parallel bending beams as elastic elements that are also parts of the moving stage. When the moving stage is pushed up by a piezoelectric actuator there exists strain and deflection in the bending beams. Eight strain gages that are employed in a bridge configuration are placed on the regions of compression and tension of the beams. Thus the micro-displacement of the moving stage that is proportional to the output of the bridge can be measured.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156308
Show Author Affiliations
Pengsheng Li, Harbin Institute of Technology (China)
Hainan Cai, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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