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Proceedings Paper

Microdisplacement measurement in high-accuracy moving stage by strain gauges
Author(s): Pengsheng Li; Hainan Cai
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Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156308
Show Author Affiliations
Pengsheng Li, Harbin Institute of Technology (China)
Hainan Cai, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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