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Proceedings Paper

Measurement of straight-motion accuracy
Author(s): Akira Shimokohbe; Kaiji Sato; Akira Toyama; Joji Yamaguchi
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Paper Details

Date Published: 22 September 1993
PDF: 9 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156297
Show Author Affiliations
Akira Shimokohbe, Tokyo Institute of Technology (Japan)
Kaiji Sato, Tokyo Institute of Technology (Japan)
Akira Toyama, Tokyo Institute of Technology (Japan)
Joji Yamaguchi, NTT Interdisciplinary Research Lab. (Japan)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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