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Proceedings Paper

Measurement of polygon by laser point source interferometry
Author(s): Zhiwen Yang
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Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156296
Show Author Affiliations
Zhiwen Yang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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