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Proceedings Paper

Measurement of polygon by laser point source interferometry
Author(s): Zhiwen Yang
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Paper Abstract

This paper deals with the measurementprinciple of angular and pyramidal errors of the polygon mirror with laser point source interferometry gives the formulas of goniometry and analyses the measuring accuracy. The results obtained show that the testing accuracy of this method is in the range of one half second of arc. Key words: polygon mirror point source interferometry.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156296
Show Author Affiliations
Zhiwen Yang, Changchun Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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