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Proceedings Paper

Measurement principle and error analysis for an optical heterodyne profilometer
Author(s): Tao Chen; Zhu Li; Jiabi Chen
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Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156295
Show Author Affiliations
Tao Chen, Huazhong Univ. of Science and Technology (China)
Zhu Li, Huazhong Univ. of Science and Technology (China)
Jiabi Chen, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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