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Proceedings Paper

Measurement and evaluation of the damaged layer on a surface ground at ultrathin depth
Author(s): Liang-Fu Xie; Hong-Hai Zhang; Shang-Ping Li; Feng Zhu; Ri-Yao Chen; Qi-Kui Huang
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Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156291
Show Author Affiliations
Liang-Fu Xie, Huazhong Univ. of Science and Technology (China)
Hong-Hai Zhang, Huazhong Univ. of Science and Technology (China)
Shang-Ping Li, Huazhong Univ. of Science and Technology (China)
Feng Zhu, Huazhong Univ. of Science and Technology (China)
Ri-Yao Chen, Huazhong Univ. of Science and Technology (China)
Qi-Kui Huang, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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