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Proceedings Paper

Measurement and evaluation of the damaged layer on a surface ground at ultrathin depth
Author(s): Liang-Fu Xie; Hong-Hai Zhang; Shang-Ping Li; Feng Zhu; Ri-Yao Chen; Qi-Kui Huang
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Paper Abstract

The damaged layer on a ground surface is one of the important criteria for evaluating the surface quality of a workpiece. In the case of an ultra-thin depth grinding (UTDG) a very thin damaged layer has been obtained. A parameter expressing the microstructure of the damaged layer is given by the material density which is related to the acoustic parameter on the material surface. A V(z) curve from which the Rayleigh wave velocity and the total power can be calculated is gotten by using an acoustic microscope. On the basis of the above the damaged layer on a ground surface can be evaluated. KEY WORDS: Ultra-thin depth grinding Damaged layer Material density Evaluation Rayleigh wave V(z) curve 0.

Paper Details

Date Published: 22 September 1993
PDF: 5 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156291
Show Author Affiliations
Liang-Fu Xie, Huazhong Univ. of Science and Technology (China)
Hong-Hai Zhang, Huazhong Univ. of Science and Technology (China)
Shang-Ping Li, Huazhong Univ. of Science and Technology (China)
Feng Zhu, Huazhong Univ. of Science and Technology (China)
Ri-Yao Chen, Huazhong Univ. of Science and Technology (China)
Qi-Kui Huang, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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