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Proceedings Paper

Laser interferometric device for measuring step gauges with high accuracy
Author(s): Yan-Fen Zang; Guoxiong Zhang; Xiang-Yang Liu
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Paper Abstract

A device used for measuring step gauges with high accuracy is introduced in this paper. This device can divide the laser beam from interferometer into two beams parallel to the measured line The two beams are reflected by a right angle prism and a plane mirror respectively which are fixed on the measuring head. The Abbe error caused by the error of angular motion of measuring head is eliminated when the distance of the two beams equals the distance between the measured line and the laser beam near the line. The measuring head with the right angle prism and plane mirror can move to and from the step gauges without breaking the beams. With different types of probes this device can measure 1D (one dimensional) ball array 2D (two dimensional) ball arrayand other datum artifacts with step distance et al. .

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156281
Show Author Affiliations
Yan-Fen Zang, Tianjin Univ. (China)
Guoxiong Zhang, Tianjin Univ. (China)
Xiang-Yang Liu, Tianjin Institute of Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

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