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Proceedings Paper

Infrared multiwavelength He-Ne laser absolute-distance interferometer for diameter measurement of large-scale workpiece
Author(s): Zheng You; WeiMing Ren; Jinwen Liang
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Paper Details

Date Published: 22 September 1993
PDF: 6 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156262
Show Author Affiliations
Zheng You, Tsinghua Univ. (China)
WeiMing Ren, Tsinghua Univ. (China)
Jinwen Liang, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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