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Proceedings Paper

High-accuracy measurement of dimensional minichanges of large-size components with laser interferometry
Author(s): Jun Xu; YiBao Yuan; Zhen-Liang Ding; Hua Li; Zhong Chen
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Paper Abstract

This paper studies laser intcricroniclric mcasurcnicnt methods For detecting thc dimensional niinichangcs of largcsizc COIllpOllCfltS points OUt that thc dcadpath error is a niain error factor ifl flicasurenlefli and analyzcs the rcla tio nslup bet vccn the dcadpa th error a ni cnvironnicnta Cond itions. A special vacti tuil pipChas hCCn dCSignC(1 I 0 red nec the dead jiih c FF()r t fl d lo r I in iii (1 i ni en si on Ch a iigcs ni ens u reni cii I ace u racy o F 1c1 icr th an 3 x IO8rclativc to the length oF large component (or dcadpath) is obtained from 1 5t2 to 25t.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156256
Show Author Affiliations
Jun Xu, Harbin Institute of Technology (China)
YiBao Yuan, Harbin Institute of Technology (China)
Zhen-Liang Ding, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)
Zhong Chen, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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