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Proceedings Paper

High-accuracy measurement of dimensional minichanges of large-size components with laser interferometry
Author(s): Jun Xu; YiBao Yuan; Zhen-Liang Ding; Hua Li; Zhong Chen
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Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156256
Show Author Affiliations
Jun Xu, Harbin Institute of Technology (China)
YiBao Yuan, Harbin Institute of Technology (China)
Zhen-Liang Ding, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)
Zhong Chen, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments

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