Share Email Print

Proceedings Paper

High-accuracy measurement of dimensional minichanges of large-size components with laser interferometry
Author(s): Jun Xu; YiBao Yuan; Zhen-Liang Ding; Hua Li; Zhong Chen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper studies laser intcricroniclric mcasurcnicnt methods For detecting thc dimensional niinichangcs of largcsizc COIllpOllCfltS points OUt that thc dcadpath error is a niain error factor ifl flicasurenlefli and analyzcs the rcla tio nslup bet vccn the dcadpa th error a ni cnvironnicnta Cond itions. A special vacti tuil pipChas hCCn dCSignC(1 I 0 red nec the dead jiih c FF()r t fl d lo r I in iii (1 i ni en si on Ch a iigcs ni ens u reni cii I ace u racy o F 1c1 icr th an 3 x IO8rclativc to the length oF large component (or dcadpath) is obtained from 1 5t2 to 25t.

Paper Details

Date Published: 22 September 1993
PDF: 4 pages
Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); doi: 10.1117/12.156256
Show Author Affiliations
Jun Xu, Harbin Institute of Technology (China)
YiBao Yuan, Harbin Institute of Technology (China)
Zhen-Liang Ding, Harbin Institute of Technology (China)
Hua Li, Harbin Institute of Technology (China)
Zhong Chen, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 2101:
Measurement Technology and Intelligent Instruments
Li Zhu, Editor(s)

© SPIE. Terms of Use
Back to Top