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Proceedings Paper

Reflection of soft X rays from quasi-periodic multilayer films
Author(s): Nian-Hua Liu; Wei Guo Feng; Xiang Wu
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Paper Abstract

A quasi-periodic design method for soft x-ray multilayer reflector to achieve high reflectivity and low loss is presented. The dependence of the reflectivity on the optical constants of the absorbing layers for a given substrate and spacer materials is investigated, and the criterion of choosing optical components is also discussed. We find that when the extinction coefficient of the absorber is large, the reflectivity of the multilayer reflector is governed by the difference of the extinction coefficients of the components. In order to obtain high reflectivity in the case of large extinction coefficient, one should choose a pair of materials with large difference of extinction coefficients.

Paper Details

Date Published: 10 September 1993
PDF: 7 pages
Proc. SPIE 1928, International Symposium on Laser-Plasma Interactions, (10 September 1993); doi: 10.1117/12.155785
Show Author Affiliations
Nian-Hua Liu, Tongji Univ. and Jian Teachers Training College (China)
Wei Guo Feng, Tongji Univ. (China)
Xiang Wu, International Ctr. for Materials Physics, CCAST, and Tongji Univ. (China)


Published in SPIE Proceedings Vol. 1928:
International Symposium on Laser-Plasma Interactions

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