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Proceedings Paper

Laser metrology gauges for OSI
Author(s): Yekta Gursel
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Paper Abstract

Heterodyne interferometers have been commercially available for many years. In addition, many versions have been built at JPL for various projects. This activity is aimed at improving the accuracy of such interferometers from the 1 - 30 nanometer level to the picometer level for use in the proposed OSI and SONATA missions as metrology gauges. In the null-gauge configuration, we obtained a precision of 0.6 picometers at time scales of 2,500 seconds. In the relative-gauge configuration, we obtained an accuracy of 3.5 picometers rms in vacuum at time scales of few minutes. As absolute gauge with an accuracy of 10 microns over a distance of 10 meters in under construction.

Paper Details

Date Published: 10 September 1993
PDF: 10 pages
Proc. SPIE 1947, Spaceborne Interferometry, (10 September 1993); doi: 10.1117/12.155740
Show Author Affiliations
Yekta Gursel, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 1947:
Spaceborne Interferometry
Robert D. Reasenberg, Editor(s)

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