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Proceedings Paper

Aberration problem in electron optics
Author(s): Albert V. Crewe
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Paper Abstract

This paper discusses what appears to be a crisis in the field of electron microscope--a term which is broad enough to include ion microscopy, just as the term electron optics includes ion optics. The crisis is that we seem to have reached a performance limit in all instruments, and there are no known or proven ways to improve upon present levels.

Paper Details

Date Published: 3 September 1993
PDF: 8 pages
Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); doi: 10.1117/12.155704
Show Author Affiliations
Albert V. Crewe, Univ. of Chicago (United States)


Published in SPIE Proceedings Vol. 2014:
Charged-Particle Optics
William B. Thompson; Mitsugu Sato; Albert V. Crewe, Editor(s)

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