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Proceedings Paper

Performance characteristics of integrated low-energy broad ion beam extraction optics
Author(s): D. Korzec; H.-M. Keller; J. Engemann
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Paper Details

Date Published: 3 September 1993
PDF: 13 pages
Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); doi: 10.1117/12.155692
Show Author Affiliations
D. Korzec, Univ. of Wuppertal (Germany)
H.-M. Keller, Univ. of Wuppertal (Germany)
J. Engemann, Univ. of Wuppertal (Germany)

Published in SPIE Proceedings Vol. 2014:
Charged-Particle Optics
William B. Thompson; Mitsugu Sato; Albert V. Crewe, Editor(s)

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