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Proceedings Paper

Simulation and interpretation of scanning electron microscope images
Author(s): Maya Balasubramanyam; Eric Munro; Jim Taylor
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Paper Abstract

Scanning Electron Microscope (SEM) image simulation techniques have recently started to be used as a means of quantitative interpretation of SEM micrographs. A method of image simulation has been developed which takes into account image formation processes from the point of impact of the primary beam on the sample to the point of electron collection by the detector. Firstly the interaction between the specimen and the primary beam is modelled in order to determine the distribution of the electrons emitted from the specimen. The beam/specimen interaction model is based on original Monte Carlo programs by Joy and Luo. The paths of the electrons in the specimen chamber are then computed using software by Rouse. Images of a variety of samples with various surface topographies were simulated and the effect of varying the detector configuration was studied. All computations were performed using a 80486 Personal Computer. The results were then compared with micrographs taken using a Leica Cambridge S360 SEM.

Paper Details

Date Published: 3 September 1993
PDF: 8 pages
Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); doi: 10.1117/12.155690
Show Author Affiliations
Maya Balasubramanyam, Imperial College of Science, Technology and Medicine (United Kingdom)
Eric Munro, Imperial College of Science, Technology and Medicine (United Kingdom)
Jim Taylor, Leica Cambridge (United Kingdom)


Published in SPIE Proceedings Vol. 2014:
Charged-Particle Optics
William B. Thompson; Mitsugu Sato; Albert V. Crewe, Editor(s)

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