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Proceedings Paper

Design of an achromatic mass separator for a focused-ion-beam system
Author(s): Jochen Teichert; Michail A. Tiunov
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Paper Abstract

The design of an achromatic mass separator which consists of two ExB filters, a stigmator, and the separation aperture is described. The optical properties of the ExB filters are derived. The influence of the designed mass separator on the spatial resolution of the column and the fringing field effects are discussed. First experimental results are shown.

Paper Details

Date Published: 3 September 1993
PDF: 11 pages
Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); doi: 10.1117/12.155687
Show Author Affiliations
Jochen Teichert, Research Ctr. Rossendorf Inc. (Germany)
Michail A. Tiunov, Institute for Nuclear Physics Novosibirsk (Russia)


Published in SPIE Proceedings Vol. 2014:
Charged-Particle Optics
William B. Thompson; Mitsugu Sato; Albert V. Crewe, Editor(s)

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