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Proceedings Paper

Computational modeling techniques in charged-particle optics
Author(s): Eric Munro
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Paper Abstract

In this paper, some of the key techniques used in the computer modelling of charged particle optical systems are reviewed and illustrated. The topics covered include: Magnetic electron lens design using the finite element method; electrostatic lens design by finite element and finite difference methods; analysis of matrix lenses and multipole lenses, using a fully three- dimensional (3D) finite difference analysis; treatment of asymmetry errors in construction and alignment of electron lenses, using perturbation methods; analysis of electrostatic and magnetic deflection fields by finite difference, boundary integral and finite element methods; design of complete electron and ion beam columns containing arbitrary combinations of lenses and deflectors; simulation of discrete Coulomb interaction effects and diffraction effects; 3D simulation of fields and trajectories in secondary electron detectors for topographic and voltage contrast; design of electron sources, using second-order finite element method; design and aberration analysis of curved axis systems, such as imaging energy filters, using wavefront aberrations; and the dynamic correction of deflection aberrations in high- performance scanning systems. All the examples presented in the paper have been run and plotted on a personal computer system.

Paper Details

Date Published: 3 September 1993
PDF: 15 pages
Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); doi: 10.1117/12.155686
Show Author Affiliations
Eric Munro, Munro's Electron Beam Software Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 2014:
Charged-Particle Optics
William B. Thompson; Mitsugu Sato; Albert V. Crewe, Editor(s)

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