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Proceedings Paper

Heterodyne holographic method of data acquisition on thickness variation of transparent plates and films
Author(s): E. I. Krupitsky; S. V. Morosov; Tatyana N. Sergeenko
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Paper Abstract

The holographic method to control transparent plate and film thickness variations by heterodyne measurement of the phase of transversed coherent light is theoretically and experimentally analyzed. It provides very high accuracy (about 1 nm) of the thickness variations measurements in visible range.

Paper Details

Date Published: 3 September 1993
PDF: 6 pages
Proc. SPIE 1978, Coherent Measuring and Data Processing Methods and Devices, (3 September 1993); doi: 10.1117/12.155040
Show Author Affiliations
E. I. Krupitsky, Bonch-Bruyevich Saint Petersburg Electrical Communication Institute (Russia)
S. V. Morosov, Bonch-Bruyevich Saint Petersburg Electrical Communication Institute (Russia)
Tatyana N. Sergeenko, Bonch-Bruyevich Saint Petersburg Electrical Communication Institute (Russia)


Published in SPIE Proceedings Vol. 1978:
Coherent Measuring and Data Processing Methods and Devices

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