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Proceedings Paper

Base-catalyzed photosensitive polyimide
Author(s): Dennis R. McKean; Gregory M. Wallraff; Willi Volksen; Nigel P. Hacker; Martha I. Sanchez; Jeff W. Labadie
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Paper Abstract

A scheme for imaging of polyimide films is described which is based on the amine-catalyzed imidization of poly(amic alkyl ester) precursor polymers. Films containing amine photogenerators along with poly(amic alkyl esters) are patterned by exposure followed by heating to partially imidize the exposed portion of the film. Negative images are developed by taking advantage of the greater solubility of the precursor polymer which is dissolved in an appropriate solvent mixture. A final cure is carried out to complete the imidization of the patterned film.

Paper Details

Date Published: 15 September 1993
PDF: 9 pages
Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); doi: 10.1117/12.154807
Show Author Affiliations
Dennis R. McKean, IBM Almaden Research Ctr. (United States)
Gregory M. Wallraff, IBM Almaden Research Ctr. (United States)
Willi Volksen, IBM Almaden Research Ctr. (United States)
Nigel P. Hacker, IBM Almaden Research Ctr. (United States)
Martha I. Sanchez, IBM Almaden Research Ctr. (United States)
Jeff W. Labadie, IBM Almaden Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1925:
Advances in Resist Technology and Processing X
William D. Hinsberg, Editor(s)

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