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Proceedings Paper

193 nm lithography with ultrathin surface imaging resist systems
Author(s): Charles S. Dulcey; Tim S. Koloski; Walter J. Dressick; Mu-San Chen; Jacque H. Georger; Jeffrey M. Calvert
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Paper Abstract

Deep UV photochemical patterning of chemisorbed metal-binding (ligating) organosilane films has been previously used to demonstrate sub-0.5 micrometers patterned additive metallization by electroless deposition. Significant photospeed advantages have now been obtained using a two step process in which an organosilane film is first patterned and then functionalized to impart the ability to metallize. This is achieved by photochemical patterning of a film which lacks a ligating group, but which is optimized for photospeed. The pattern of chemical functions so created is then reacted with an organic ligand which selectively places the ligand functionalities on the surface. Treatment with an aqueous Pd catalyst followed by electroless plating deposits metal in patterns defined by the irradiation step. Using several chemical approaches based upon this concept, metal patterns have been fabricated to 0.5 micrometers feature width at doses of 50 mJ/cm2 at 193 nm.

Paper Details

Date Published: 15 September 1993
PDF: 9 pages
Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); doi: 10.1117/12.154800
Show Author Affiliations
Charles S. Dulcey, Naval Research Lab. (United States)
Tim S. Koloski, Naval Research Lab. (United States)
Walter J. Dressick, Naval Research Lab. (United States)
Mu-San Chen, Geo-Centers, Inc. (United States)
Jacque H. Georger, Shipley Co. Inc and Geo-Centers, Inc. (United States)
Jeffrey M. Calvert, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 1925:
Advances in Resist Technology and Processing X
William D. Hinsberg, Editor(s)

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