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Novel novolac resins produced from 2,6-bishydroxymethyl-p-cresol, p-cresol, and m-cresol: a method to more evenly distribute p-cresol units throughout a novolac resin
Author(s): Alfred T. Jeffries; David J. Brzozowy; Nancy N. Greene; Tadayoshi Kokubo; Shiro Tan
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Paper Abstract

In an effort to improve the performance of positive resists by increasing the amounts of o,o- bonding, some m-/p-cresol novolacs were prepared in which a portion of the p-cresol was replaced by 2,6-bishydroxymethyl-p-cresol (BHMPC). This work distinguishes itself from earlier work in which BHMPC was the sole source of p-cresol. Fractionated BHMPC polymers were shown to incorporate more p-cresol into their higher molecular weight portions of the molecules. The parent novolacs possessed lower molecular weights and polydispersivities than conventional m-/p-cresol novolacs of the same composition. The lithographically acceptable polymers were evaluated on an 0.52 NA i-line stepper. The resists made from the fractionated BHMPC polymers exhibited a direct relationship between the amount of p-cresol in the higher molecular weight fractions and resolution. The reasons for the difference in performance are discussed in terms of the m-/p-cresol contents of the fractionated and unfractionated polymers as determined by carbon-13 nmr.

Paper Details

Date Published: 15 September 1993
PDF: 11 pages
Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); doi: 10.1117/12.154757
Show Author Affiliations
Alfred T. Jeffries, OCG Microelectronic Materials, Inc. (United States)
David J. Brzozowy, OCG Microelectronic Materials, Inc. (United States)
Nancy N. Greene, OCG Microelectronic Materials, Inc. (United States)
Tadayoshi Kokubo, Fuji Photo Film Co., Ltd. (Japan)
Shiro Tan, Fuji Photo Film Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1925:
Advances in Resist Technology and Processing X
William D. Hinsberg, Editor(s)

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